Lithographic apparatus
US10114299B2 · kind B2 · utility
0Cited by
1References
19Claims
0Family size
Assignee
Inventors
- Günes NAKIBOGLU
- Mark Constant Johannes Baggen
- Gerard Johannes Boogaard
- Nicolaas Rudolf Kemper
- Sander Kerssemakers
- Robertus Mathijs Gerardus Rijs
- Frank Johannes Jacobus Van Boxtel
- Erwin Antonius Henricus Fransiscus Van Den Boogaert
- Marc Wilhelmus Maria Van Der Wijst
- Martinus Van Duijnhoven
- Jessica Henrica Anna Verdonschot
- Hendrikus Herman Marie Cox
Key dates
| Filing date | May 7, 2015 |
| Grant date | Oct 30, 2018 |
| Priority date | — |
| Expiry date | May 7, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG10K11/172
- WIPO fieldOther consumer goods
- WIPO sectorOther fields
Abstract
A lithographic apparatus has a compartment which accommodates a movable object. Movements of the movable object cause acoustic disturbances in the compartment. An acoustic damper is arranged to damp the acoustic disturbances in the compartment and comprises a chamber (100) in communication with the compartment and a perforated plate (101), having a plurality of through-holes (102), between the chamber and the compartment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.