Günes NAKIBOGLU
17Patents
2h-index
63Co-inventors
49Inventor score
Filing activity: Jan 20, 2015 → Mar 22, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10895808B2 | Substrate holder, a lithographic apparatus and method of manufacturing devices | Physics | 2 | Active |
| US10241422B2 | Lithography apparatus and a method of manufacturing a device | Physics | 2 | Active |
| US9939740B2 | Lithographic apparatus and device manufacturing method | Physics | 1 | Active |
| US9977348B2 | Lithographic apparatus and method | Physics | 1 | Active |
| US10222713B2 | Patterning device cooling apparatus | Physics | 1 | Active |
| US10495985B2 | Lithographic apparatus and device manufacturing method | Physics | 1 | Active |
| US10317804B2 | Substrate table, lithographic apparatus and method of operating a lithographic apparatus | Physics | 0 | Active |
| US12411424B2 | Temperature conditioning system, a lithographic apparatus and a method of temperature conditioning an object | Physics | 0 | Active |
| US10990025B2 | Patterning device cooling apparatus | Physics | 0 | Active |
| US10345717B2 | Lithographic apparatus and method | Physics | 0 | Active |
| US10114299B2 | Lithographic apparatus | Physics | 0 | Active |
| US10571810B2 | Substrate table, a lithographic apparatus and a method of operating a lithographic apparatus | Physics | 0 | Active |
| US10133197B2 | Lithographic apparatus and device manufacturing method | Physics | 0 | Active |
| US10877384B1 | Radiation shielding device and apparatus comprising such shielding device | Physics | 0 | Active |
| US11009800B2 | Measurement system, lithographic apparatus and device manufacturing method | Physics | 0 | Active |
| US11579533B2 | Substrate holder, a lithographic apparatus and method of manufacturing devices | Physics | 0 | Active |
| US10114295B2 | Lithographic apparatus and device manufacturing method | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.