Patent · US Active

Closed-loop automatic defect inspection and classification

US10114368B2 · kind B2 · utility

1Cited by

23References

20Claims

0Family size

Assignee

Applied Materials Israel Ltd. · IL

Inventors

Gadi Greenberg · Nes Ziona, IL
Idan Kaizerman · Meitar, IL
Zeev Zohar · Migdal, IL

Key dates

Filing date	Jul 22, 2013
Grant date	Oct 30, 2018
Priority date	—
Expiry date	Oct 15, 2034

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02P90/02
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Inspection apparatus includes an imaging module, which is configured to capture images of defects at different, respective locations on a sample. A processor is coupled to process the images so as to automatically assign respective classifications to the defects, and to autonomously control the imaging module to continue capturing the images responsively to the assigned classifications.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.