Systems and method for laser voltage imaging
US10126360B2 · kind B2 · utility
0Cited by
4References
29Claims
0Family size
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Key dates
| Filing date | Oct 16, 2015 |
| Grant date | Nov 13, 2018 |
| Priority date | — |
| Expiry date | Oct 16, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2834
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method for laser voltage testing of a DUT is disclosed. The system enables laser voltage probing and laser voltage imaging of devices within the DUT. A selected area of the DUT is illuminating a while the DUT is receiving test signals causing certain of the active devices to modulate. Light reflected from the DUT is collected and is converted into an electrical signal. The electrical signal is sampled by an ADC and the output of the ADC is sent to an FPGA. The FPGA operates on the signal so as to provide an output that emulates a spectrum analyzer or a vector analyzer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.