Patent · US Active

Scanning acoustic microscope sensor array for chip-packaging interaction package reliability monitoring

US10134649B2 · kind B2 · utility

1Cited by
8References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 6, 2016
Grant dateNov 20, 2018
Priority date
Expiry dateJan 6, 2036

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/35121
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A method includes forming a flip-chip module including a chip connected to a substrate with a layer of underfill material adhered to the chip and the substrate; sensing chip-packaging interaction failure in the underfilled flip-chip module in situ; reporting in-situ chip-packaging interaction failure to a device in real-time; and imaging the chip-packaging interaction failure with an indirect scanning acoustic microscope.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.