Method for calibrating and imaging using multi-tip scanning probe microscope
US10139429B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 9, 2017 |
| Grant date | Nov 27, 2018 |
| Priority date | — |
| Expiry date | May 9, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q70/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems, methods, and program products are provided for the calibration and scanning of multiple AFM probe heads used employed together for synchronous scanning. An automated calibration process is provided employing scan data from multiple AFM probe heads to automatically calibrate the system and position the probe heads at relative offset positions that are successively closer and more precise. Multiple heads are scanned simultaneously and synchronously to produce scan images, which are automatically evaluated to recognize a common feature. From this, a relative offset of the images is calculated and the true position of each probe tip may be known. Using this knowledge, a position offset is applied to bring the probe tips closer together at a desired spatial relationship. The techniques may be repeated at two or more levels varying from coarse to fine, and may be repeated after probing or movement to a new region of interest.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.