Diaphragm changing device

US10139733B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Hermann Bieg · Wertingen, DE
• Marcus Will · Neu-Ulm, DE
• Thomas C. Bischoff · Buxtehude, DE
• Yim-Bun Patrick Kwan · Aalen, DE
• Uy-Liem Nguyen · Wetzikon, CH
• Stefan Xalter · Oberkochen, DE
• Michael Muehlbeyer · Aalen, DE

Key dates

• Filing date: Mar 3, 2016
• Grant date: Nov 27, 2018
• Expiry date: Apr 6, 2036

Classification

• Technology area (CPC G): Physics
• CPC primary: G21K1/067
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The invention relates to an optical imaging device, in particular an objective 1 for microlithography in the field of EUVL for producing semiconductor components, having a beam path 2, a plurality of optical elements 3 and a diaphragm device 7 with an adjustable diaphragm opening shape. The diaphragm device has a diaphragm store 7a, 7b with a plurality of different diaphragm openings 6 with fixed shapes in each case, which can be introduced into the beam path 2.