Mobile dispense device for chemicals used in micro-processing

US10146132B2 · kind B2 · utility

Assignee

• GlobalFoundries Inc. · KY

Inventors

• Sidheswara Mahapatra · Dresden, DE
• Wolfram Grundke · Dresden, DE
• Heiko Wagner · Dresden, DE

Key dates

• Filing date: Jan 13, 2017
• Grant date: Dec 4, 2018
• Expiry date: Jan 13, 2037

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/30
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

The present disclosure relates to techniques for supplying different chemical products to process tools of a manufacturing environment used for micro-processing substrates. To this end, the various types of chemical products may be supplied by providing mobile dispense devices having incorporated therein any required hardware components for dispensing a chemical product. Moreover, the mobile dispense devices are appropriately equipped so as to enable coupling to and removal from respective process tools, such as wafer tracks of modern lithography tools. Due to the mobile or modular nature of the respective chemical product lines, a significant reduction of cost of ownership, increased tool availability and reduced investment costs may be achieved compared to conventional regimes.