Heiko Wagner
6Patents
2h-index
9Co-inventors
40Inventor score
Filing activity: Jul 23, 2003 → Jan 13, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7325224B2 | Method and system for increasing product yield by controlling lithography on the basis of electrical speed data | Physics | 13 | Expired |
| US7006195B2 | Method and system for improving exposure uniformity in a step and repeat process | Physics | 2 | Expired |
| US7346407B2 | Method of operating an advanced process controller by dynamically adapting hierarchy levels | Emerging Cross-Sectional Technologies | 0 | Expired |
| US10007198B2 | Method including an adjustment of a plurality of wafer handling elements, system including a plurality of wafer handling elements and photolithography track | Electricity | 0 | Active |
| US10146132B2 | Mobile dispense device for chemicals used in micro-processing | Physics | 0 | Active |
| US7962459B2 | Method of providing context specific recipes in a semiconductor facility by defining product categories | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.