Transfer apparatus and plasma processing system
US10147633B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 12, 2012 |
| Grant date | Dec 4, 2018 |
| Priority date | — |
| Expiry date | Nov 28, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67709
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A transfer apparatus transfers an object to be transferred onto a case. The transfer apparatus includes a transfer arm, an arm shaft, a plurality of electromagnets, and a control unit. The transfer arm has a pick unit on a front end thereof and extends and retracts in a horizontal direction. The object to be transferred is held on the pick unit. The arm shaft supports the transfer arm. The plurality of electromagnets apply an force in upward direction to the transfer arm by generating a magnetic field in the case. The control unit controls the plurality of electromagnets in such a manner that when the transfer arm extends and retracts in the horizontal direction, the force in upward direction applied to the transfer arm increases as a length from the arm shaft to the front end of the transfer arm increases.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.