Etsuji Ito
10Patents
2h-index
18Co-inventors
47Inventor score
Filing activity: May 27, 2004 → Sep 25, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7368876B2 | Plasma processing apparatus | Electricity | 2 | Expired |
| US9859146B2 | Semiconductor manufacturing device and processing method | Electricity | 2 | Active |
| US9390943B2 | Substrate processing apparatus | Electricity | 2 | Active |
| US10651012B2 | Substrate processing method | Electricity | 1 | Active |
| US8895454B2 | Etching method of multilayer film | Electricity | 0 | Active |
| US10943766B2 | Power feed member and substrate processing apparatus | Electricity | 0 | Active |
| US10763087B2 | Plasma processing apparatus | Electricity | 0 | Active |
| US10699935B2 | Semiconductor manufacturing device and processing method | Electricity | 0 | Active |
| US10147633B2 | Transfer apparatus and plasma processing system | Electricity | 0 | Active |
| US9978566B2 | Plasma etching method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.