On-chip capacitors with floating islands

US10147783B2 · kind B2 · utility

Assignee

• GlobalFoundries Inc. · KY

Inventors

• Atsushi Ogino · Kodaira, JP
• Vikrant Chauhan · Beacon, US
• Kong Boon Yeap · Clifton Park, US
• Ahmed Hassan · Clifton Park, US

Key dates

• Filing date: Mar 20, 2017
• Grant date: Dec 4, 2018
• Expiry date: Mar 20, 2037

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D1/714

Abstract

Structures for an on-chip capacitor and methods of forming an on-chip capacitor. A metal terminal is formed that has a side edge. Metal fingers are formed that have a parallel arrangement. Floating islands comprised of a metal are formed and are electrically isolated from the metal fingers. Each of the metal fingers has an end and extends from the side edge of the metal terminal toward the end. Each of the floating islands is arranged in a spaced relationship with the end of a respective one of the metal fingers.