Patent · US Active

Integrated fan-out package and manufacturing method thereof

US10157871B1 · kind B1 · utility

13Cited by
10References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 12, 2017
Grant dateDec 18, 2018
Priority date
Expiry dateOct 12, 2037

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/35121
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

An integrated fan-out package includes a die, an encapsulant, a redistribution structure, a plurality of conductive pillars, a seed layer, and a plurality of conductive bumps. The encapsulant encapsulates the die. The redistribution structure is over the die and the encapsulant. The redistribution structure is electrically connected to the die and includes a plurality of dielectric layers that are sequentially stacked and a plurality of conductive patterns sandwiched between the dielectric layers. A Young's modulus of the dielectric layer farthest away from the die is higher than a Young's modulus of each of the rest of the dielectric layers. The conductive patterns are electrically connected to each other. The conductive pillars are disposed on and electrically connected to the redistribution structure. The seed layer is located between the conductive pillars and the redistribution structure. The conductive bumps are disposed on the plurality of conductive pillars.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.