Flexible equipment front end module interfaces, environmentally-controlled equipment front end modules, and assembly methods

US10159169B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Joseph Vincent · Mukilteo, US
• Michael Kuchar · Georgetown, US
• Dean C. Hruzek · Cedar Park, US
• Vijayabaskar Soundarrajan · Bengaluru, IN
• Pandu Maddherla · Darsi, IN
• Adam J. Wyatt · Round Rock, US
• Robert M. McAndrew · Austin, US

Key dates

• Filing date: Oct 27, 2016
• Grant date: Dec 18, 2018
• Expiry date: May 8, 2037

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67201
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

An equipment front end module interface of an equipment front end module including environmental controls. The equipment front end module interface includes a first mounting member configured to couple to a load lock assembly, and a flexible seal coupled to the first mounting member. The flexible seal provides sealing between the equipment front end module and the load lock assembly and also accommodates axial and other misalignment between the load lock assembly and the equipment front end module during assembly. Equipment front end modules including the equipment front end module interface and methods of assembling a load lock assembly to the equipment front end module using the equipment front end module interface are provided, as are other aspects.