Inventor · Georgetown, TX, US

Michael Kuchar

23Patents
6h-index
51Co-inventors
68Inventor score

Filing activity: Dec 22, 2005 → Jan 13, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US7651306B2 Cartesian robot cluster tool architecture Emerging Cross-Sectional Technologies 28 Active
US7798764B2 Substrate processing sequence in a cartesian robot cluster tool Emerging Cross-Sectional Technologies 13 Active
US7374393B2 Method of retaining a substrate during a substrate transferring process Electricity 12 Expired
US8066466B2 Substrate processing sequence in a Cartesian robot cluster tool Emerging Cross-Sectional Technologies 11 Active
US10159169B2 Flexible equipment front end module interfaces, environmentally-controlled equipment front end modules, and assembly methods Electricity 10 Active
US9091491B2 Cooling plates and semiconductor apparatus thereof Electricity 7 Active
US7374391B2 Substrate gripper for a substrate handling robot Electricity 6 Expired
US8911193B2 Substrate processing sequence in a cartesian robot cluster tool Emerging Cross-Sectional Technologies 5 Active
USD973116S1 Mainframe of substrate processing system General 4 Active
USD973737S1 Mainframe of substrate processing system General 4 Active
USD992611S1 Mainframe of substrate processing system General 2 Active
US11415230B2 Slit valve pneumatic control Electricity 2 Active
USD991994S1 Mainframe of substrate processing system General 2 Active
US11555250B2 Organic contamination free surface machining Electricity 1 Active
USD1029066S1 Mainframe of dual-robot substrate processing system General 1 Active
US11328943B2 Dual gate and single actuator system Electricity 1 Active
US9435025B2 Gas apparatus, systems, and methods for chamber ports Emerging Cross-Sectional Technologies 0 Active
US11087998B2 Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods Electricity 0 Active
US11932950B2 Organic contamination free surface machining Electricity 0 Active
US10971381B2 Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods Electricity 0 Active
US11996307B2 Semiconductor processing tool platform configuration with reduced footprint Electricity 0 Active
USD1076836S1 Mainframe with integrated lid General 0 Active
US10381247B2 Gas systems and methods for chamber ports Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.