Method of forming piezo driver electrodes
US10166777B2 · kind B2 · utility
0Cited by
5References
14Claims
0Family size
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Key dates
| Filing date | Apr 21, 2016 |
| Grant date | Jan 1, 2019 |
| Priority date | — |
| Expiry date | Jun 4, 2036 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49401
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A method for forming piezoelectric transducers for inkjet printheads includes: forming at least one piezoelectric layer on a substrate; forming at least one electrode pattern by depositing a conductive material on an exposed surface of the at least one piezoelectric layer; and forming a plurality of individual piezoelectric elements from the at least one piezoelectric layer before or after the forming of the at least one electrode pattern.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.