Self-aligned nanotube structures
US10170304B1 · kind B1 · utility
2Cited by
195References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 25, 2017 |
| Grant date | Jan 1, 2019 |
| Priority date | — |
| Expiry date | Oct 25, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K85/20
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present disclosure generally relates to semiconductor structures and, more particularly, to self-aligned nanotube structures and methods of manufacture. The structure includes at least one nanotube structure supported by a plurality of spacers and an insulator material between the spacers and contacting the at least one nanotube structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.