Patent · US Active

SOI-based floating gate memory cell

US10177163B1 · kind B1 · utility

1Cited by
3References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 13, 2018
Grant dateJan 8, 2019
Priority date
Expiry dateFeb 13, 2038

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/31053
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

One illustrative device disclosed a floating gate capacitor located in and above a first region of an SOI substrate located on a first side of an isolation trench and a transistor device located in and above a second region of the SOI substrate that is on the opposite side of the isolation trench. The device also includes a control gate formed in the bulk semiconductor layer in the first region and a gate structure that extends across the isolation trench and above the first and second regions. A first portion of the gate structure is positioned above the first region and the control gate and a second portion of the gate structure is positioned above the second region, wherein the first portion of the gate structure constitutes a floating gate for the floating gate capacitor and the second portion of the gate structure constitutes a transistor gate structure for the transistor device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.