Image based specimen process control
US10181185B2 · kind B2 · utility
9Cited by
25References
35Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 9, 2017 |
| Grant date | Jan 15, 2019 |
| Priority date | — |
| Expiry date | Jan 19, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods and systems for detecting anomalies in images of a specimen are provided. One system includes one or more computer subsystems configured for acquiring images generated of a specimen by an imaging subsystem. The computer subsystem(s) are also configured for determining one or more characteristics of the acquired images. In addition, the computer subsystem(s) are configured for identifying anomalies in the images based on the one or more determined characteristics without applying a defect detection algorithm to the images or the one or more characteristics of the images.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.