Systems and methods for synchronizing execution of recipe sets
US10191466B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 6, 2016 |
| Grant date | Jan 29, 2019 |
| Priority date | — |
| Expiry date | Mar 4, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/1215
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
Systems and methods for synchronizing execution of recipe sets are described. One of the methods includes sending by a command controller to a master controller a recipe set and sending by the master controller the recipe set for execution by a sub-system controller of a plasma system. The operation of sending the recipe set from the master controller to the sub-controller is performed during a first clock cycle of a clock signal. The method includes generating by the command controller a recipe event signal and sending by the command controller to the sub-system controller the recipe event signal indicating a time of execution of the recipe set by the sub-system controller. The time of execution occurs during a second clock cycle that follows the first clock cycle. The second cycle is of the clock signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.