Inventor · Berkeley, CA, US

John C. Valcore, Jr.

94Patents
19h-index
34Co-inventors
80Inventor score

Filing activity: Feb 16, 2007 → Feb 13, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US9508529B2 System, method and apparatus for RF power compensation in a plasma processing system Electricity 119 Active
US7728602B2 Harmonic derived arc detector Electricity 90 Active
US8890537B2 Harmonic derived arc detector Electricity 55 Active
US9299539B2 Method and apparatus for measuring wafer bias potential Electricity 44 Active
US10102321B2 System, method and apparatus for refining radio frequency transmission system models Physics 44 Active
US9842725B2 Using modeling to determine ion energy associated with a plasma system Electricity 39 Active
US9320126B2 Determining a value of a variable on an RF transmission model Electricity 35 Active
US10469108B2 Systems and methods for using computer-generated models to reduce reflected power towards a high frequency RF generator during a cycle of operations of a low frequency RF generator Electricity 34 Active
US9114666B2 Methods and apparatus for controlling plasma in a plasma processing system Electricity 34 Active
US9779196B2 Segmenting a model within a plasma system Physics 33 Active
US9390893B2 Sub-pulsing during a state Electricity 30 Active
US8901935B2 Methods and apparatus for detecting the confinement state of plasma in a plasma processing system Physics 30 Active
US8501631B2 Plasma processing system control based on RF voltage Physics 29 Active
US9620337B2 Determining a malfunctioning device in a plasma system Electricity 25 Active
US10157729B2 Soft pulsing Electricity 24 Active
US9171699B2 Impedance-based adjustment of power and frequency Electricity 22 Active
US9408288B2 Edge ramping Electricity 21 Active
US9607810B2 Impedance-based adjustment of power and frequency Electricity 21 Active
US9720022B2 Systems and methods for providing characteristics of an impedance matching model for use with matching networks Electricity 19 Active
US10231321B2 State-based adjustment of power and frequency Electricity 18 Active
US9368329B2 Methods and apparatus for synchronizing RF pulses in a plasma processing system Electricity 18 Active
US9197196B2 State-based adjustment of power and frequency Electricity 17 Active
US9711332B2 Systems and methods for tuning an impedance matching network in a step-wise fashion for multiple states of an RF generator Electricity 14 Active
US9620334B2 Control of etch rate using modeling, feedback and impedance match Electricity 13 Active
US9455126B2 Arrangement for plasma processing system control based on RF voltage Physics 13 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.