Systems and methods for detecting the existence of one or more environmental conditions within a substrate processing system
US10192762B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 19, 2016 |
| Grant date | Jan 29, 2019 |
| Priority date | — |
| Expiry date | Dec 22, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6773
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Methods for operating a substrate processing cluster tool include positioning a substrate storage cassette within a factory interface of the substrate processing cluster tool, wherein the substrate storage cassette defines an interior volume dimensioned and arranged to receive one or more substrates, and sensing, by execution of stored instructions by a processor operatively associated with a plurality of sensors, at least one of occurrence of a condition of a plurality of conditions within the interior volume or persistence of a condition of the plurality of conditions within the interior volume. Responsive to the sensing, at least one of generating an alert or performing an alternate operation involving the substrate storage cassette.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.