Inventor · Cupertino, CA, US

David Mordo

15Patents
8h-index
25Co-inventors
72Inventor score

Filing activity: Dec 7, 1990 → Feb 19, 2016

Most-cited inventions

PatentTitleAreaCited byStatus
US7265061B1 Method and apparatus for UV exposure of low dielectric constant materials for porogen removal and improved mechanical properties Electricity 573 Expired
US7253125B1 Method to improve mechanical strength of low-k dielectric film using modulated UV exposure Electricity 68 Expired
US5114242A Bichannel radiation detection method Physics 47 Expired
US7241704B1 Methods for producing low stress porous low-k dielectric materials using precursors with organic functional groups Electricity 43 Expired
US7622400B1 Method for improving mechanical properties of low dielectric constant materials Electricity 32 Expired
US7611757B1 Method to improve mechanical strength of low-K dielectric film using modulated UV exposure Electricity 32 Active
US8043667B1 Method to improve mechanical strength of low-K dielectric film using modulated UV exposure Electricity 16 Active
US7473653B1 Methods for producing low stress porous low-k dielectric materials using precursors with organic functional groups Electricity 9 Active
US8715788B1 Method to improve mechanical strength of low-K dielectric film using modulated UV exposure Electricity 8 Active
US6214526A Semiconductor processing using antireflective layer having high wet etch rate Electricity 7 Expired
US9659769B1 Tensile dielectric films using UV curing Electricity 6 Active
US7799705B1 Methods for producing low stress porous low-k dielectric materials using precursors with organic functional groups Electricity 4 Active
US7781351B1 Methods for producing low-k carbon doped oxide films with low residual stress Electricity 2 Expired
US9870937B2 High productivity deposition reactor comprising a gas flow chamber having a tapered gas flow space Electricity 1 Active
US10192762B2 Systems and methods for detecting the existence of one or more environmental conditions within a substrate processing system Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.