Electron-bombarded charge-coupled device and inspection systems using EBCCD detectors
US10197501B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 10, 2012 |
| Grant date | Feb 5, 2019 |
| Priority date | — |
| Expiry date | Sep 4, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/1538
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A focusing EBCCD includes a control device positioned between a photocathode and a CCD. The control device has a plurality of holes therein, wherein the plurality of holes are formed perpendicular to a surface of the photocathode, and wherein a pattern of the plurality of holes is aligned with a pattern of pixels in the CCD. Each hole is surrounded by at least one first electrode, which is formed on a surface of the control device facing the photocathode. The control device may include a plurality of ridges between the holes. The control device may be separated from the photocathode by approximately half a shorter dimension of a CCD pixel or less. A plurality of first electrodes may be provided, wherein each first electrode surrounds a given hole and is separated from the given hole by a gap.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.