John Fielden
148Patents
31h-index
102Co-inventors
93Inventor score
Filing activity: Jan 7, 1980 → Mar 16, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6633831B2 | Methods and systems for determining a critical dimension and a thin film characteristic of a specimen | Emerging Cross-Sectional Technologies | 246 | Expired |
| US7929667B1 | High brightness X-ray metrology | Electricity | 146 | Active |
| US4351028A | Meters for measuring electrical energy consumption | Physics | 130 | Expired |
| US8179530B2 | Methods and systems for determining a critical dimension and overlay of a specimen | Electricity | 127 | Active |
| US6694284B1 | Methods and systems for determining at least four properties of a specimen | Electricity | 120 | Expired |
| US6891627B1 | Methods and systems for determining a critical dimension and overlay of a specimen | Electricity | 117 | Expired |
| US6111634A | Method and apparatus for in-situ monitoring of thickness using a multi-wavelength spectrometer during chemical-mechanical polishing | Electricity | 103 | Expired |
| US6707540B1 | In-situ metalization monitoring using eddy current and optical measurements | Physics | 95 | Expired |
| US6433541B1 | In-situ metalization monitoring using eddy current measurements during the process for removing the film | Physics | 92 | Expired |
| US4471232A | Method of and apparatus for controlling loads on an electrical power supply | Emerging Cross-Sectional Technologies | 79 | Expired |
| US6673637B2 | Methods and systems for determining a presence of macro defects and overlay of a specimen | Electricity | 71 | Expired |
| US4349879A | Apparatus for controlling electrical power consumption | Emerging Cross-Sectional Technologies | 67 | Expired |
| US6919957B2 | Methods and systems for determining a critical dimension, a presence of defects, and a thin film characteristic of a specimen | Electricity | 66 | Expired |
| US5563506A | Electricity meters using current transformers | Physics | 60 | Expired |
| US8929406B2 | 193NM laser and inspection system | Electricity | 58 | Active |
| US4345311A | Electronic kilowatt-hour meter for measuring electrical energy consumption | Physics | 57 | Expired |
| US6829559B2 | Methods and systems for determining a presence of macro and micro defects on a specimen | Emerging Cross-Sectional Technologies | 56 | Expired |
| US8873596B2 | Laser with high quality, stable output beam, and long life high conversion efficiency non-linear crystal | Physics | 50 | Active |
| US7317531B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 49 | Expired |
| US6782337B2 | Methods and systems for determining a critical dimension an a presence of defects on a specimen | Electricity | 47 | Expired |
| US7139083B2 | Methods and systems for determining a composition and a thickness of a specimen | Emerging Cross-Sectional Technologies | 47 | Expired |
| US7751046B2 | Methods and systems for determining a critical dimension and overlay of a specimen | Electricity | 45 | Expired |
| US6812045B1 | Methods and systems for determining a characteristic of a specimen prior to, during, or subsequent to ion implantation | Electricity | 45 | Expired |
| US7196782B2 | Methods and systems for determining a thin film characteristic and an electrical property of a specimen | Emerging Cross-Sectional Technologies | 39 | Expired |
| US7106425B1 | Methods and systems for determining a presence of defects and a thin film characteristic of a specimen | Physics | 39 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.