High-pressure container, substrate processing apparatus, and method for manufacturing high-pressure container
US10207349B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 21, 2013 |
| Grant date | Feb 19, 2019 |
| Priority date | — |
| Expiry date | Jan 26, 2036 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23H1/00
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
In the present disclosure, the high-pressure chamber includes a chamber main body including a flat rectangular parallelepiped block of a metal which is formed with a flat cavity that serves as a substrate processing space in which a processing using a high-pressure fluid is performed on a substrate, and the substrate processing space being formed by machining the block from one of faces of the block other than the widest face towards another face opposing thereto. In a case where the cavity is constituted as a through hole, the though hole is provided with a cover configured to open or close the cavity on one side of the through hole, and a second block configured to air-tightly seal the cavity on the other side.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.