Laser-assisted device alteration using synchronized laser pulses
US10209274B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 23, 2015 |
| Grant date | Feb 19, 2019 |
| Priority date | — |
| Expiry date | Apr 14, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/31917
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pulsed-laser LADA system is provided, which utilizes temporal resolution to enhance spatial resolution. The system is capable of resolving CMOS pairs within the illumination spot using synchronization of laser pulses with the DUT clock. The system can be implemented using laser wavelength having photon energy above the silicon bandgap so as to perform single-photon LADA or wavelength having photon energy below the silicon bandgap so as to generate two-photon LADA. The timing of the laser pulses can be adjusted using two feedback loops tied to the clock signal of an ATE, or by adjusting the ATE's clock signal with reference to a fixed-pulse laser source.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.