Apparatus for and method of sensing fluorine concentration
US10228322B2 · kind B2 · utility
1Cited by
2References
1Claims
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Key dates
| Filing date | Jul 13, 2017 |
| Grant date | Mar 12, 2019 |
| Priority date | — |
| Expiry date | Jul 13, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0427
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is an apparatus for and method of measuring the concentration of F2 in the laser gas used in an excimer laser. Quartz Enhanced Photoacoustic Spectroscopy is used to obtain a direct measurement of F2 concentration quickly and using only a small sample volume.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.