HHG source, inspection apparatus and method for performing a measurement
US10234771B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 14, 2017 |
| Grant date | Mar 19, 2019 |
| Priority date | — |
| Expiry date | Apr 14, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8845
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is a method of performing a measurement in an inspection apparatus, and an associated inspection apparatus and HHG source. The method comprises configuring one or more controllable characteristics of at least one driving laser pulse of a high harmonic generation radiation source to control the output emission spectrum of illumination radiation provided by the high harmonic generation radiation source; and illuminating a target structure with said illuminating radiation. The method may comprise configuring the driving laser pulse so that the output emission spectrum comprises a plurality of discrete harmonic peaks. Alternatively the method may comprise using a plurality of driving laser pulses of different wavelengths such that the output emission spectrum is substantially monochromatic.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.