Charged particle beam device, sample observation method, sample platform, observation system, and light emitting member
US10241062B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 22, 2014 |
| Grant date | Mar 26, 2019 |
| Priority date | — |
| Expiry date | Mar 22, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2605
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The purpose of the present invention is to eliminate the effort in placement and extraction of samples in observations using transmitted charged particles. A charged particle beam device (601) is characterized by having: a charged particle optical lens tube that irradiates a sample (6) with a primary charged particle beam; a sample stage on which a light emitting member (500) that emits light because of charged particles that have come by transmission internally in the sample (6) or scattering therefrom or a sample platform (600) having the light emitting member (500) is attachably and detachably disposed; and a detector (503) that detects the light emitted by the light emitting member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.