Micro heater, micro sensor and micro sensor manufacturing method
US10241094B2 · kind B2 · utility
2Cited by
7References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 7, 2016 |
| Grant date | Mar 26, 2019 |
| Priority date | — |
| Expiry date | Feb 15, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B3/26
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micro heater includes a substrate formed of an anodized film and a heater electrode formed on the substrate and provided with a heat generation wiring line. The heat generation wiring line is formed in a laminated state. Also disclosed are a micro sensor and a micro sensor manufacturing method.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.