Test cell for laminate and method

US10249548B2 · kind B2 · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Sushumna Iruvanti · Wappingers Falls, US
• Shidong Li · Poughkeepsie, US
• Marek A. Orlowski · Fishkill, US
• David L. Questad · Hopewell Junction, US
• Tuhin Sinha · Oradell, US
• Krishna R. Tunga · Wappingers Falls, US
• Thomas A. Wassick · Lagrangeville, US
• Randall J. Werner · Poughkeepsie, US
• Jeffrey A. Zitz · Poughkeepsie, US

Key dates

• Filing date: Nov 15, 2017
• Grant date: Apr 2, 2019
• Expiry date: Nov 15, 2037

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2924/15311
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A laminate includes a plurality of buildup layers disposed on a core and a plurality of unit cells defined in the buildup layers. Each unit cell includes: at least one test via that passes through at least two of the buildup layers and that is electrically connected to testing locations on a probe accessible location of the laminate; and two or more dummy vias disposed in the unit cell. The dummy vias are arranged in the unit cell at one of a plurality of distances from the test via.