Processing apparatus, processing method, and storage medium
US10261521B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 14, 2016 |
| Grant date | Apr 16, 2019 |
| Priority date | — |
| Expiry date | Mar 25, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/41303
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Disclosed is a processing apparatus including a chamber, at least one nozzle, a measuring unit, an opening/closing unit, and a controller. The chamber accommodates a workpiece therein. The nozzle is provided in the chamber to supply a processing fluid toward the workpiece. The measuring unit measures a supply flow rate of the processing fluid supplied to the nozzle. The opening/closing unit performs opening/closing of a flow path of the processing fluid to be supplied to the nozzle. The controller outputs opening and closing operation signals at a preset timing. After outputting the opening operation signal, the controller calculates an integrated amount of the processing fluid based on a measurement result of the measuring unit, and performs an output timing change processing to change a timing of outputting the opening or closing operation signal from the preset timing based on the calculated integrated amount.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.