Yuichi Douki
22Patents
5h-index
50Co-inventors
72Inventor score
Filing activity: Jun 11, 2001 → Feb 9, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7994793B2 | Jig for detecting position | Electricity | 16 | Active |
| US6973370B2 | Substrate processing apparatus and method for adjusting a substrate transfer position | Emerging Cross-Sectional Technologies | 13 | Expired |
| US8149005B2 | Jig for detecting position | Electricity | 9 | Active |
| US8480319B2 | Coating and developing apparatus, coating and developing method and non-transitory tangible medium | Electricity | 9 | Active |
| US8403601B2 | Substrate transfer apparatus and substrate treatment system | Emerging Cross-Sectional Technologies | 5 | Active |
| US8277163B2 | Substrate transfer apparatus, substrate process system, and substrate transfer method | Electricity | 4 | Active |
| US6790681B2 | Substrate processing apparatus and substrate processing method | Emerging Cross-Sectional Technologies | 3 | Expired |
| US9136150B2 | Substrate processing apparatus, substrate processing method and non-transitory storage medium | Electricity | 3 | Active |
| US8755935B2 | Substrate holder positioning method and substrate processing system | Electricity | 2 | Active |
| US9507349B2 | Substrate transfer apparatus, substrate transfer method, and non-transitory storage medium | Physics | 2 | Active |
| US8506186B2 | Coating and developing apparatus, coating and developing method and non-transitory tangible medium | Electricity | 1 | Active |
| US6518657B2 | Semiconductor device and lead frame assembly/lead frame for making a semiconductor device | Electricity | 1 | Expired |
| US9299599B2 | Thermal processing apparatus for thermal processing substrate and positioning method of positioning substrate transfer position | Electricity | 1 | Active |
| US10685858B2 | Substrate processing method and substrate processing apparatus | Electricity | 0 | Active |
| US10261521B2 | Processing apparatus, processing method, and storage medium | Physics | 0 | Active |
| US8749257B2 | Position detecting method for performing position alignment of transfer point of transfer arm | Electricity | 0 | Active |
| US10256127B2 | Substrate transfer apparatus, substrate transfer method, and non-transitory storage medium | Physics | 0 | Active |
| US12269052B2 | Substrate liquid processing apparatus and liquid discharge evaluation method | Electricity | 0 | Active |
| US11024518B2 | Substrate processing apparatus, substrate processing method and recording medium | Electricity | 0 | Active |
| US9953852B2 | Liquid processing aparatus | Emerging Cross-Sectional Technologies | 0 | Active |
| US12057327B2 | Substrate processing apparatus and substrate processing method | Electricity | 0 | Active |
| US11135698B2 | Processing apparatus, processing method, and storage medium | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.