Inventor · Kumamoto, JP

Yuichi Douki

22Patents
5h-index
50Co-inventors
72Inventor score

Filing activity: Jun 11, 2001 → Feb 9, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US7994793B2 Jig for detecting position Electricity 16 Active
US6973370B2 Substrate processing apparatus and method for adjusting a substrate transfer position Emerging Cross-Sectional Technologies 13 Expired
US8149005B2 Jig for detecting position Electricity 9 Active
US8480319B2 Coating and developing apparatus, coating and developing method and non-transitory tangible medium Electricity 9 Active
US8403601B2 Substrate transfer apparatus and substrate treatment system Emerging Cross-Sectional Technologies 5 Active
US8277163B2 Substrate transfer apparatus, substrate process system, and substrate transfer method Electricity 4 Active
US6790681B2 Substrate processing apparatus and substrate processing method Emerging Cross-Sectional Technologies 3 Expired
US9136150B2 Substrate processing apparatus, substrate processing method and non-transitory storage medium Electricity 3 Active
US8755935B2 Substrate holder positioning method and substrate processing system Electricity 2 Active
US9507349B2 Substrate transfer apparatus, substrate transfer method, and non-transitory storage medium Physics 2 Active
US8506186B2 Coating and developing apparatus, coating and developing method and non-transitory tangible medium Electricity 1 Active
US6518657B2 Semiconductor device and lead frame assembly/lead frame for making a semiconductor device Electricity 1 Expired
US9299599B2 Thermal processing apparatus for thermal processing substrate and positioning method of positioning substrate transfer position Electricity 1 Active
US10685858B2 Substrate processing method and substrate processing apparatus Electricity 0 Active
US10261521B2 Processing apparatus, processing method, and storage medium Physics 0 Active
US8749257B2 Position detecting method for performing position alignment of transfer point of transfer arm Electricity 0 Active
US10256127B2 Substrate transfer apparatus, substrate transfer method, and non-transitory storage medium Physics 0 Active
US12269052B2 Substrate liquid processing apparatus and liquid discharge evaluation method Electricity 0 Active
US11024518B2 Substrate processing apparatus, substrate processing method and recording medium Electricity 0 Active
US9953852B2 Liquid processing aparatus Emerging Cross-Sectional Technologies 0 Active
US12057327B2 Substrate processing apparatus and substrate processing method Electricity 0 Active
US11135698B2 Processing apparatus, processing method, and storage medium Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.