Anti-contamination trap, and vacuum application device
US10269533B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 18, 2014 |
| Grant date | Apr 23, 2019 |
| Priority date | — |
| Expiry date | Jan 30, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2002
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In conventional structures, a space between a dual cooling tank is vacuum insulated, and a cooling part is cooled via a highly thermally conductive material connected to an inner container. Such structures are affected by heat infiltrating into the highly thermally conductive material and the cooling part. For instance, in cases when liquid nitrogen is used as a coolant, it takes approximately 30 minutes for the temperature to reach −120° C. Even in cases when a significant amount of time has been spent, the temperature only reaches approximately −150° C., and thus falls significantly short of the temperature of liquid nitrogen, namely −196° C. Accordingly, an anti-contamination trap and a vacuum application device according to the present invention are provided with a structure in which a device-internal cooling part in the vacuum application device is cooled, and are characterized by being provided with: a cooling tank filled with a coolant for cooling a cooling part; and a cooling pipe extending from the cooling tank to the vicinity of the cooling part. The anti-contamination trap and the vacuum application device are further characterized in that: the coolant is supplied to an …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.