Binary metallization structure for nanoscale dual damascene interconnects
US10269698B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 20, 2017 |
| Grant date | Apr 23, 2019 |
| Priority date | — |
| Expiry date | Dec 20, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L23/53266
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A structure is provided that includes a lower interconnect level that includes a first interconnect dielectric material layer having an opening that contains a first bimetallization interconnect structure. An upper interconnect level is located above the lower interconnect level. The upper interconnect level includes a second interconnect dielectric material layer having a combined via/line opening, wherein the line portion of the combined via/line opening contains a second bimetallization interconnect structure. In accordance with the present application, the first and second bimetallization interconnect structures comprises a first electrically conductive structure composed of a first electrically conductive metal or metal alloy material having a first bulk resistivity surrounding a second electrically conductive structure composed of a second electrically conductive metal or metal alloy material having a second bulk resistivity that is less than the first bulk resistivity and a grain size greater than 10 nm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.