Particle beam inspector with independently-controllable beams
US10276346B1 · kind B1 · utility
2Cited by
35References
41Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 30, 2016 |
| Grant date | Apr 30, 2019 |
| Priority date | — |
| Expiry date | Sep 30, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2826
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A multi-beam inspection system includes one or more particle beam sources to generate two or more particle beams, a set of particle control elements configured to independently direct the two or more particle beams to a sample, one or more detectors positioned to receive particles emanating from the sample in response to the two or more particle beams, and a controller communicatively coupled to the one or more detectors. The controller includes one or more processors to generate two or more inspection datasets associated with the particles received by the one or more detectors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.