Dual-channel showerhead for formation of film stacks
US10276353B2 · kind B2 · utility
4Cited by
0References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 29, 2016 |
| Grant date | Apr 30, 2019 |
| Priority date | — |
| Expiry date | Mar 18, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32091
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method and apparatus for a dual-channel showerhead is provided. In one embodiment the showerhead comprises a body comprising a conductive material having a plurality of first openings formed therethrough comprising a first gas channel and a plurality of second openings formed therethrough comprising a second gas channel that is fluidly separated from the first gas channel, wherein each of the first openings having a geometry that is different than each of the second openings.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.