Shielded probe systems with controlled testing environments

US10281492B2 · kind B2 · utility

Assignee

• FormFactor Beaverton, Inc. · US

Inventors

• Michael Teich · Mannheim, DE
• Karsten Stoll · Wilthen, DE
• Walter Matthias Clauss · Radeberg, DE
• Swen Schmiedchen · Dresden, DE

Key dates

• Filing date: Oct 5, 2017
• Grant date: May 7, 2019
• Expiry date: Oct 5, 2037

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N31/02
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Shielded probe systems are disclosed herein. The shielded probe systems are configured to test a device under test (DUT) and include an enclosure that defines an enclosure volume, a translation stage with a stage surface, a substrate-supporting assembly extending from the stage surface, an electrically conductive shielding structure, an isolation structure, and a thermal shielding structure. The substrate-supporting assembly includes an electrically conductive support surface, which is configured to support a substrate that includes the DUT. The electrically conductive shielding structure defines a shielded volume. The isolation structure electrically isolates the electrically conductive shielding structure from the enclosure and from the translation stage. The thermal shielding structure extends within the enclosure volume and at least partially between the enclosure and the substrate-supporting assembly.