Method of generating an examination recipe and system thereof
US10290087B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 11, 2017 |
| Grant date | May 14, 2019 |
| Priority date | — |
| Expiry date | Sep 11, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30168
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
There are provided system and method of generating an examination recipe usable for examining a specimen, the method comprising: capturing images from dies and obtaining noise map indicative of noise distribution on the images; receiving design data representative of a plurality of design groups each having the same design pattern; calculating a group score for each given design group, the group score calculated based on the noise data associated with the given design group and a defect budget allocated for area of the given design group; providing segmentation related to the dies, comprising: associating design groups with segmentation labels indicative of different noise levels based on the group score, thereby obtaining a set of die segments each corresponding to one or more design groups associated with the same segmentation label and segmentation configuration data; and generating an examination recipe using the segmentation configuration data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.