Vacuum processing apparatus
US10290472B2 · kind B2 · utility
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8Claims
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Key dates
| Filing date | Mar 17, 2016 |
| Grant date | May 14, 2019 |
| Priority date | — |
| Expiry date | Sep 10, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/334
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In a vacuum processing apparatus including: a vacuum container including a processing chamber therein; a plasma formation chamber; plate members being arranged between the processing chamber and the plasma formation chamber; and a lamp and a window member being arranged around the plate members, in order that a wafer and the plate members are heated by electromagnetic waves from the lamp, a bottom surface and a side surface of the window member is formed of a member transmitting the electromagnetic waves therethrough.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.