Apparatus and method to reduce and control resistivity of deionized water
US10294132B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 15, 2015 |
| Grant date | May 21, 2019 |
| Priority date | — |
| Expiry date | Dec 2, 2037 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC02F2209/05
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
An apparatus and method to convert high resistivity (18 MOhm/cm) deionized water into lower resistivity deionized water with a tight resistivity range. The apparatus is diminished in size to require less space, has an improved sensitivity resistivity probe to permit a lower operating range, an increased communication rate with updated control logic to permit holding tighter tolerances. The method is environmentally friendly in that it replaces the use of harsh chemistries and eliminates the generation of hazardous waste.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.