VEECO PRECISION SURFACE PROCESSING LLC
17Patents
17Active
17Granted
50Portfolio score
Filing activity: Feb 28, 2013 → Jun 8, 2018
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9541837B2 | Apparatus and method for removing challenging polymer films and structures from semiconductor wafers | Electricity | 5 | Active |
| US9698062B2 | System and method for performing a wet etching process | Electricity | 3 | Active |
| US10559488B2 | Two-level tape frame rinse assembly | Electricity | 2 | Active |
| US10413850B2 | Apparatus and method to remove solids from material lift off post process solvents | Electricity | 1 | Active |
| US9870928B2 | System and method for updating an arm scan profile through a graphical user interface | Electricity | 1 | Active |
| US10443943B2 | Apparatus and method to control properties of fluid discharge via refrigerative exhaust | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US9333446B2 | Apparatus and method to remove undissolved solids from post process dry film strip solvents | Performing Operations; Transporting | 0 | Active |
| US10026660B2 | Method of etching the back of a wafer to expose TSVs | Electricity | 0 | Active |
| US10503182B2 | Apparatus and method for metals free reduction and control of resistivity of deionized water | Chemistry; Metallurgy | 0 | Active |
| US10553502B2 | Two etch method for achieving a wafer thickness profile | Electricity | 0 | Active |
| US10446387B2 | Apparatus and method to control etch rate through adaptive spiking of chemistry | Electricity | 0 | Active |
| US10022745B2 | Apparatus for dual speed spin chuck | Electricity | 0 | Active |
| US10239031B2 | Apparatus and method for mixing fluids with degradational properties | Performing Operations; Transporting | 0 | Active |
| US9768041B2 | Collection chamber apparatus to separate multiple fluids during the semiconductor wafer processing cycle | Electricity | 0 | Active |
| US10294132B2 | Apparatus and method to reduce and control resistivity of deionized water | Chemistry; Metallurgy | 0 | Active |
| US9694436B2 | System and method for flux coat, reflow and clean | Performing Operations; Transporting | 0 | Active |
| US10541180B2 | Apparatus and method for wafer thinning in advanced packaging applications | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.