Patent · US Active

Method and system for identifying a clean endpoint time for a chamber

US10309013B2 · kind B2 · utility

2Cited by

1References

14Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Ilias Iliopoulos · Paris, FR
Shuo Na · Sunnyvale, US
Jose Albor · San Jose, US

Key dates

Filing date	Mar 13, 2014
Grant date	Jun 4, 2019
Priority date	—
Expiry date	Jan 25, 2036

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB08B13/00
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

Systems and methods are provided for determining a clean endpoint time for a current run of a chamber. The clean endpoint time for the current run may be determined by determining that a chamber parameter, such as a chamber pressure, has stabilized. Historical clean endpoint time data is updated by adding the clean endpoint time for the current run of the chamber. A recommended clean endpoint time is then determined for the chamber based on the updated historical clean endpoint time data.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.