Shuo Na
5Patents
1h-index
7Co-inventors
33Inventor score
Filing activity: Mar 13, 2014 → Sep 26, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10309013B2 | Method and system for identifying a clean endpoint time for a chamber | Performing Operations; Transporting | 2 | Active |
| US9704762B2 | Application of in-line glass edge-inspection and alignment check in display manufacturing | Electricity | 0 | Active |
| US10269601B2 | Chamber leak and gas contaimination detection | Electricity | 0 | Active |
| US9653269B2 | Detecting arcing using processing chamber data | Electricity | 0 | Active |
| US10002748B2 | Detection of grounding strap breakage | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.