Inventor · Sunnyvale, CA, US

Shuo Na

5Patents
1h-index
7Co-inventors
33Inventor score

Filing activity: Mar 13, 2014 → Sep 26, 2016

Most-cited inventions

PatentTitleAreaCited byStatus
US10309013B2 Method and system for identifying a clean endpoint time for a chamber Performing Operations; Transporting 2 Active
US9704762B2 Application of in-line glass edge-inspection and alignment check in display manufacturing Electricity 0 Active
US10269601B2 Chamber leak and gas contaimination detection Electricity 0 Active
US9653269B2 Detecting arcing using processing chamber data Electricity 0 Active
US10002748B2 Detection of grounding strap breakage Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.