Electrostatic clamp and a method for manufacturing the same

US10310391B2 · kind B2 · utility

Assignee

• ASML Holding N.V. · NL

Inventors

• Matthew Lipson · Sunnyvale, US
• Vincent Dimilia · Pleasantville, US
• Ronald Peter Totillo · Brookfield, US
• Tammo Uitterdijk · De Bilt, NL
• Steven M. Zimmerman · Pleasant Valley, US

Key dates

• Filing date: Jul 9, 2015
• Grant date: Jun 4, 2019
• Expiry date: Jul 9, 2035

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C03B25/02
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

An electrostatic clamp (300) and a method for manufacturing the same is disclosed. The electrostatic clamp includes a first layer (302) having a first ultra-low expansion (ULE) material, a second layer (304) coupled to the first layer, having a second ULE material, and a third layer (306), coupled to the second layer, having a third ULE material. The electrostatic clamp further includes a plurality of fluid channels (316) located between the first layer and the second layer and a composite layer (308) interposed between the second layer and the third layer. The method for manufacturing the electrostatic clamp includes forming the plurality of fluid channels, disposing the composite layer on the third layer, and coupling the third layer to the second layer. The plurality of fluid channels is configured to carry a thermally conditioned fluid for temperature regulation of a clamped object.