Tammo Uitterdijk
34Patents
5h-index
79Co-inventors
68Inventor score
Filing activity: Dec 19, 2003 → Jun 9, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7405805B2 | Lithographic apparatus and device manufacturing method | Physics | 14 | Expired |
| US7375799B2 | Lithographic apparatus | Physics | 12 | Expired |
| US7580113B2 | Method of reducing a wave front aberration, and computer program product | Physics | 11 | Active |
| US10001713B2 | Lithographic apparatus and method | Electricity | 6 | Active |
| US7239370B2 | Lithographic apparatus and device manufacturing method | Physics | 5 | Expired |
| US7379154B2 | Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicle | Physics | 5 | Expired |
| US7843552B2 | Lithographic apparatus, device manufacturing method, and mask having a pellicle attached hereto | Physics | 4 | Active |
| US10324383B2 | Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus | Electricity | 3 | Active |
| US7372633B2 | Lithographic apparatus, aberration correction device and device manufacturing method | Physics | 2 | Active |
| US7924403B2 | Lithographic apparatus and device and device manufacturing method | Physics | 2 | Active |
| US7535644B2 | Lens element, lithographic apparatus, device manufacturing method, and device manufactured thereby | Physics | 2 | Expired |
| US9482967B2 | Lithographic apparatus, control system and device manufacturing method | Physics | 2 | Active |
| US10310391B2 | Electrostatic clamp and a method for manufacturing the same | Chemistry; Metallurgy | 1 | Active |
| US8013978B2 | Lithographic apparatus and device manufacturing method | Physics | 1 | Active |
| US7508489B2 | Method of manufacturing a miniaturized device | Physics | 1 | Active |
| US7538952B2 | Lithographic apparatus, aberration correction device and device manufacturing method | Physics | 1 | Active |
| US7538875B2 | Lithographic apparatus and methods for use thereof | Physics | 1 | Active |
| US7136152B2 | Method for bonding a pellicle to a patterning device and patterning device comprising a pellicle | Emerging Cross-Sectional Technologies | 1 | Expired |
| US9606448B2 | Lithographic apparatus and device manufacturing method | Emerging Cross-Sectional Technologies | 1 | Active |
| US8542342B2 | Method of manufacturing a miniaturized device | Physics | 0 | Active |
| US9170498B2 | Lithographic apparatus and a method for determining a polarization property of a projection system using an adjustable polarizer and interferometric sensor | Physics | 0 | Active |
| US11270906B2 | Burls with altered surface topography for holding an object in lithography applications | Electricity | 0 | Active |
| US10274842B2 | Electrostatic clamp and a method for manufacturing the same | General | 0 | Revoked |
| US8045134B2 | Lithographic apparatus, control system and device manufacturing method | Physics | 0 | Active |
| US12111581B2 | Method to manufacture nano ridges in hard ceramic coatings | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.