Methods and apparatus for semiconductor sample workflow
US10312162B2 · kind B2 · utility
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14Claims
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Key dates
| Filing date | Jun 6, 2017 |
| Grant date | Jun 4, 2019 |
| Priority date | — |
| Expiry date | Jun 6, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/7075
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Apparatus and methods are described for the automated transfer and storage of transmission electron microscope (TEM) and scanning/transmission electron microscope (STEM) lamella samples throughout a semiconductor manufacturing facility using existing automation infrastructure such as a Front Opening Unified Pod (FOUP). Also provided are wafer facsimiles corresponding to outer dimensions of semiconductor, data storage or solar cell wafers, wherein the facsimiles adapted to store, carry and/or provide a testing platform for testing of samples taken from semiconductor, data storage or solar cell wafers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.