Fabrication of vertical fuses from vertical fins
US10319677B2 · kind B2 · utility
2Cited by
5References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 30, 2018 |
| Grant date | Jun 11, 2019 |
| Priority date | — |
| Expiry date | May 30, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D84/811
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A vertical fuse element, including, a conductive silicide base on a surface of a substrate, and a conductive silicide pillar extending in a direction perpendicular to the surface of the substrate, where the conductive silicide pillar is on the conductive silicide base, and wherein the conductive silicide pillar includes an upper portion having a width, W5, a base having a width, W6, and a neck region having a width, W7, where W7<W5, and W7≤W6.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.