Patent · US Active

Maintenance apparatus

US10322919B2 · kind B2 · utility

1Cited by

15References

12Claims

0Family size

Assignee

Integrated Dynamics Engineering GmbH · DE

Inventors

Andreas Birkner · Jena, DE
Simon SCHADT · Wiesbaden, DE
Arndt Evers · Oestrich-Winkel, DE

Key dates

Filing date	Mar 3, 2017
Grant date	Jun 18, 2019
Priority date	—
Expiry date	Jun 15, 2037

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/67742
WIPO fieldHandling
WIPO sectorMechanical engineering

Abstract

A maintenance apparatus, in particular for lifting and moving components of a system for processing semiconductor devices. The apparatus comprises a beam and an arm with means for lifting a component, the arm being mounted to the beam via a connecting unit and so as to be pivotable in a horizontal plane, wherein the connecting unit is displaceable along the beam, and wherein the arm is displaceable perpendicularly to the beam, and wherein a load accommodation means is provided on the pivotable arm.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.